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# ELLIPSOMETRY

Aimé Vareille, Patrice Ballet.

Planning and related links
Frequently Asked Questions
Version 0.485

"La générosité est l'art d'engendrer la liberté de l'autre"
Copyleft of René Descartes ( 1596-1650 )

Instrumentation project using free GNU GPL software : measure of polarization, thin film ellipsometry

Special mention :
Many were happy : the blind can see, the deaf can hear and the invalid can go. Do you know how good is the light, ellipsometry is a good way for controlling picometer actions and so, we will be able to shape the world atom by atom.
These pages are dedicated to those, they have very difficult situations to live, and are, in fact, the few they can make sense with our incredible projects : http://www.multimania.com/cybershadow/

I. Introduction

II. Instrumental equations
II.1. Description of the polarized light
II.2. Matrix representations of optics
II.3. Photodetection

III. Simple measures of polarization
III.1. Measure by cancellation (Nulling polarimetry) (Sénarmont)
III.2. Stokes's parameters measurements

IV. Measures of distance
IV.1. Picometer by ellipsometry
IV.2. Interferometry and ellipsometry
IV.3. Picometers over kilometers

V Thin film ellipsometry
V.1. Nulling Ellipsometry
V.2. Rotating birefringent ellipsometer
V.3. Interpretation of measures (commented multilayer algorithms)
V.4. Precision of the measures of thicknesses for thin films

VI. Examples of ellipsometric measurements
VI.1. Kinetics of oxidation of the silicon
VI.2. Compaction of lithographic resist
VI.3. Cartography of siliciure of germanium

VII. Photoelasticity
VII.1. Stresses and Strains in thin films
VII.2. Chromatic dispersion of photoelasticity

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